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InP Sub n type

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Standard Specifications
Notes

(*1) VCZ:Vapor Pressure Controlled Czochralski
(*2) EPD Guaranteed Area:Percentage of points within spec.
(*3) High Precision OF(±0.02°)is available for 2"φ.
(*4) EW:Etched Wafer
(*5) LPD:Light Point Defects

Attached Data

- Standard

Resistivity・Mobility・Diameter・OF・IF・Thickness (min.~max.)
EPD Map

- Option

Accuracy of Orientation・Flatness・Light Point Defects

To Catalog List (InP Sub)

Semi-Insulating

n type

p type

Other specifications

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