InP Sub p type

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Standard Specifications
Notes

（＊1） VCZ：Vapor Pressure Controlled Czochralski
（＊2） EPD Guaranteed Area：Percentage of points within spec.
（＊3） High Precision OF（±0.02°）is available for 2"φ.
（＊4） EW：Etched Wafer
（＊5） LPD：Light Point Defects
 
Attached Data

- Standard

 ：

Resistivity・Mobility・Diameter・OF・IF・Thickness （min.～max.）
EPD Map

- Option

 ：

Accuracy of Orientation・Flatness・Light Point Defects

To Catalog List (InP Sub)

Semi-Insulating

n type

p type

Other specifications
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