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Analyzing Atomic-Level Structures to Support Faster and Larger-Capacity Devices in the Area of Optical Communications Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

Since joining the company in 1998, Shinji MATSUKAWA has been consistently involved in analysis technology based on transmission electron microscopy. At present, he is involved in developing analysis technology for compound semiconductor devices. He was awarded the Gold Prize for the Company’s R & D Award in 2007, for research and development jointly conducted with the Transmission Devices R & D Laboratories.

01 Research 02 "We can do it, because we're Sumitomo Electric"

Research

Analyzing Semiconductor Lasers for Optical Communications to Provide Feedback Information to the R & D and Production Departments
Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

Technological progress in electron microscopy has made it possible to analyze physical structures at the atomic level. As if in step with that progress, structural control at the nanometer level has become essential for sophistication of products in various areas. The Analysis Technology Research Center therefore positions nanostructural analysis as a core technology for providing support to research and development activities.

I am primarily in charge of analyzing compound semiconductor devices. Among other subjects, I deal with many concerning the analysis of semiconductor lasers used in optical communications. Semiconductor lasers have a nanometer-level structure. A change in their atomic arrangement affects product characteristics, and eventually reliability. My task is to observe the status of the structure inside a semiconductor laser, to detect defects, and to propose remedies.

Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

Analysis techniques are not solely for the purpose of observing objects. Disturbed atomic arrangements and structural abnormalities are indicative of the true situation and provide hints toward clarifying the reason for a phenomenon and toward finding a remedy for improvement. I believe that the mission of the Center is to present the reason and remedy to the research and development staff, as well as to the production departments in order to shed light on the path toward product quality improvement and sophistication.

Preparing Thin Films of Thickness 100 Nanometers or Less, for Improved Accuracy of Analysis Results

Pre-treatment techniques applied to samples are highly significant for obtaining proper analysis results. The challenge is to form a thin film that allows electron beams to pass through it, while ensuring that the sample retains its structure. Furthermore, inside the semiconductor laser there are degraded spots, which are not easily detected by external viewing. We therefore took on the challenge of developing a new technique and succeeded. This technique allows us to detect degradation in semiconductor lasers and to form a thin film 100 nanometers or less in thickness precisely including the degraded spot.

Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

It was a great achievement that we were able to contribute to improving production processes and semiconductor product quality, as a consequence of gaining experience in the above-mentioned techniques. Another problem was reliability of laser powered for an extended time. Regarding this problem, we could identify the point causing defects, by developing an analysis technique using transmission electron microscopy for crystal defects. Furthermore, we were able to clarify the mechanism of a process leading to characteristic degradation.

"We can do it, because we're Sumitomo Electric"

Continuous System Covering from Materials to Manufacture Is Helpful for Improving Analysis Technology
Shinji MATSUKAWA : Assistant Manager, Analysis Technology Research Center

Sumitomo Electric has a continuous manufacturing system that bridges the departments engaged in materials research and development, and the departments that produces products in volume. This system is highly beneficial to analysis engineers like ourselves, because extensive knowledge of the materials, structures, processes etc. handled in the Company is required for conducting analyses. Engineers frequently get together and hold discussions in a cross-departmental manner. In addition, we visit the production site in some cases. By this means we can obtain hints regarding innovative analysis techniques.

The importance of nanometer-level structural analysis continues to increase over a wide range of Sumitomo Electric’s business areas, including semiconductors and materials such as carbides used for cutting tools. I hope that analysis technology, in which we specialize, will back up Sumitomo Electric’s entire manufacturing capacity and contribute to the development of new products and to improved product quality.

Terminology

Transmission Electron Microscope (TEM)
A microscope that, for purposes of observation, irradiates an object with electron beams so as to enable the formation of an image from electrons that have passed through the object. Since the electron beam wavelength is shorter than that of visible light, TEM achieves higher resolution than is achievable by light microscopy. The object is seen through for observation and must therefore be a nanometer-level thin film.

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